March Chemical Pumps for Semiconductors

From smartphones to memory chips, semiconductors are an essential part of the technologies that make our lives easier. Requiring extremely clean materials and working environments, contaminant-free pumps are essential components to any electronics facility. Dry pumps facilitate vacuum dehydration to create clean manufacturing environments. In addition, chemical pumps for semiconductors transport process fluids throughout the plant. March Pumps’ inventory of high-quality, clean, and affordable magnetic drive pumps are expertly designed to overcome the challenges in the semiconductor manufacturing industry

Main Characteristics to Look For

High-purity chemicals are required to remove particles from the surface of silicon semiconductors. Pumps are used to transport corrosive chemicals, process water, and wastewater throughout the plant. Whether in the cleanroom or treatment facility, pumps for semiconductors must be able to handle a wide range of process fluids.

If the highly sensitive process is contaminated by any foreign objects, it will lead to dysfunctional products and damaged equipment. Pumps for semiconductors must eliminate all possible sources of contamination through aseptic materials and sealless construction.

Pumps are central to semiconductor manufacturing and are relied upon to work long operational hours. As a result, these machines must be consistent, robust, and reliable. Any downtime halts production and can prove rather costly.

Features & Benefits

March chemical pumps for semiconductor production are expertly designed with robust features to handle a wide variety of process fluids. Throughout the manufacturing process, harsh chemicals such as hydrogen peroxide and hydrochloric acid are used to clean the semiconductor. March Pumps’ Kynar pumps are equipped with corrosion resistance to ensure a long lifespan.

Along with chemical resistance, Kynar centrifugal pumps are ideal for sensitive, contaminant-free operation. In addition, March mag-drive pumps have no shaft seals to cause leakages. Conventional pumps allow process fluids to escape through mechanical seal faces. Even this small contamination is too much for cleanroom applications and can result in shutdowns. Magnetic drive pumps are a great choice for environments that rely on ultra-pure fluid transfer, such as semiconductor manufacturing.

Finally, centrifugal pumps deliver repeatable operation with high flow rates at low pressures. These reliable stream characteristics are essential in semiconductor manufacturing. The simple, low-maintenance design reduces downtime and extends the time between repairs.

Pros & Cons

Although magnetic drive centrifugal pumps are popular throughout various industries, they cannot be used for all applications. In these machines, the pumped liquid acts as a lubricant. If the pump runs dry, this can result in overheating and damaged parts. Sudden temperature changes in the process fluid results in energy losses, meaning that centrifugal pumps have their limits for power ratings and efficiency.

With no shaft seal or possibility of leakage, March magnetic drive pumps excel in applications that must remain free of contamination. They offer a variety of additional benefits for semiconductor manufacturing, such as:

• Improved performance and reliability
• Contaminant-free handling of ultra-pure liquids
• Chemical, corrosion, and oxidation resistance
• Continuous, low-maintenance operation for up to a decade
• Reduced maintenance and repair costs

The simple, low-maintenance design of magnetic drive centrifugal pumps delivers the performance required for semiconductor manufacturing. March Pumps offers an extensive array of industrial pumps that are guaranteed to fit your needs. Contact us and our team of experts will work with you to select the best pump for your semiconductor application.